By G. K. Ananthasuresh, K. J. Vinoy, S. Gopalakrishnan, K. N. Bhat, V. K. Aatre
This primary undergraduate-level textbook on Microsystems and shrewdpermanent platforms makes a burgeoning region perform obtainable to direction teaching. it really is in line with a path brought at VTU in India in 2009, which has already been taught to almost one thousand students.
Practical examples and routines will set this booklet except the pro reference books presently in use as texts at the subject.
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7 The historic Golden Bridge built in 1881 to connect Ankleshwar and Bharuch in Gujarat, India. The inset shows the details of one-time structural health monitoring of a section of the bridge. It had 66 fiber optic strain gauges and micromachined accelerometers. Courtesy: Instrumentation Scientific Technologies Pvt. com. 2 Some sensors and actuators used in smart systems Example Successful Technologies Sensor Device Acceleration Angular rate Position Physical Quantity Accelerometer Gyroscope Linear variable differential transformer (LVDT) PZT, Microfabrication Fiber optic, Microfabrication Electromagnetic Transducer Actuator Crack detection Movement Ultrasonic transducer Thermal PZT Shape memory alloy The beneficiaries and supporters of the smart systems technology have been military and aerospace industries.
Silicon micromachining has been the key factor in the fast progress of microsystems in the last decade of the 20th century. This is the fashioning of microscopic mechanical parts out of silicon substrates and more recently other materials. , that can then be suitably combined to create a variety of sensors. Bulk micromachining, which involves carving out the required structure by etching out the silicon substrate, is the commonly used method. 4 SEM image of SiO microcantilever beam 2 grating sensing elements is very prepared by bulk micromachining (wet chemical often realized with this approach.
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