Download MEMS Vibratory Gyroscopes: Structural Approaches to Improve by Cenk Acar, Andrei Shkel PDF

  • admin
  • April 20, 2017
  • Microelectronics
  • Comments Off on Download MEMS Vibratory Gyroscopes: Structural Approaches to Improve by Cenk Acar, Andrei Shkel PDF

By Cenk Acar, Andrei Shkel

MEMS Vibratory Gyroscopes offers a superb origin within the conception and basic operational rules of micromachined vibratory fee gyroscopes, and introduces structural designs that supply inherent robustness opposed to structural and environmental adaptations. within the first half, the dynamics of the vibratory gyroscope sensing aspect is constructed, universal micro-fabrication approaches and strategies general in inertial sensor construction are summarized, layout of mechanical constructions for either linear and torsional gyroscopes are awarded, and electric actuation and detection equipment are mentioned besides information on experimental characterization of MEMS gyroscopes. within the moment half, layout options that enhance robustness of the micromachined sensing aspect are brought, supported by means of confident computational examples and experimental effects illustrating the material.

Show description

Read or Download MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness (MEMS Reference Shelf) PDF

Best microelectronics books

Low pressure plasmas and microstructuring technology

This monograph offers an up to the moment standpoint of fuel discharge physics and its purposes to varied industries. It starts off from a entire evaluate of the different sorts to generate plasmas through DC discharges, capacitive and inductive radiofrequency coupling, helicon waves together with electron cyclotron resonance, and ion beams.

Customizable Embedded Processors: Design Technologies and Applications (Systems on Silicon)

Customizable processors were defined because the subsequent usual step within the evolution of the microprocessor enterprise: a step within the lifetime of a brand new expertise the place most sensible functionality by myself is not any longer enough to assure industry good fortune. different components develop into primary, equivalent to time to industry, comfort, strength potency, and simplicity of customization.

Discontinuous Systems: Lyapunov Analysis and Robust Synthesis under Uncertainty Conditions

A huge challenge on top of things engineering is strong suggestions layout that stabilizes a nominal plant whereas additionally attenuating the impression of parameter diversifications and exterior disturbances. This monograph addresses this challenge in doubtful discontinuous dynamic platforms with detailed recognition to electromechanical structures with hard-to-model nonsmooth phenomena reminiscent of friction and backlash.

Adhesion in Microelectronics

This entire booklet will offer either basic and utilized features of adhesion concerning microelectronics in one and simply obtainable resource. one of the subject matters to be lined include;Various theories or mechanisms of adhesionSurface (physical or chemical) characterization of fabrics because it relates to adhesionSurface cleansing because it relates to adhesionWays to enhance adhesionUnraveling of interfacial interactions utilizing an array of pertinent techniquesCharacterization of interfaces / interphasesPolymer-polymer adhesionMetal-polymer adhesion  (metallized polymers)Polymer adhesion to varied substratesAdhesion of skinny filmsAdhesion of underfillsAdhesion of molding compoundsAdhesion of other dielectric materialsDelamination and reliability concerns in packaged devicesInterface mechanics and crack propagationAdhesion size of skinny movies and coatings

Additional info for MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness (MEMS Reference Shelf)

Example text

Again, in a simple single-mass design, mC , md and ms are equal. 45) To achieve the maximum possible gain in the sense-mode, it is generally desirable to operate at or near the peak of the sense-mode response curve. This is typically achieved by matching drive and sense resonant frequencies. e. 46) Investigating the resonant amplitude of the sense-mode Coriolis response, the sensitivity of the gyroscope to the angular rate input Ωz can be improved by • Increasing the drive-mode oscillation amplitude x0 • Increasing Qs by decreasing damping, usually by vacuum packaging • Maximizing the mass mC that generates the Coriolis force, while minimizing the total mass ms excited by the Coriolis force.

Wet etching of polysilicon, silicon oxide, silicon nitride and metals are isotropic, meaning that the etch rate is the same in all directions. However, wet etching of crystalline structures such as single crystal silicon or quartz can be either isotropic or anisotropic. In anisotropic etching, the etch rate depends on the crystallographic orientation. For single crystal silicon, Tetramethylammonium hydroxide (TMAH) and potassium hydroxide (KOH) are the most common anisotropic etchants. With KOH, the <111> planes etch up to 400 times slower than the <100> planes.

Depending on the structural layer forming technique, micromachining processes are usually divided into two major categories: Surface micromachining and Bulk micromachining. As the micromachining process demands evolve, modern process flows adapt characteristics of both categories, and the distinction becomes more vague. Bulk micromachining traditionally implies the use of subtractive processes to pattern thick structural layers. In most bulk micromachining processes, two or more wafers are bonded, and the moving structures are made out of the whole thickness of a silicon wafer.

Download PDF sample

Rated 4.25 of 5 – based on 19 votes