By Cenk Acar, Andrei Shkel
MEMS Vibratory Gyroscopes offers a superb origin within the conception and basic operational rules of micromachined vibratory fee gyroscopes, and introduces structural designs that supply inherent robustness opposed to structural and environmental adaptations. within the first half, the dynamics of the vibratory gyroscope sensing aspect is constructed, universal micro-fabrication approaches and strategies general in inertial sensor construction are summarized, layout of mechanical constructions for either linear and torsional gyroscopes are awarded, and electric actuation and detection equipment are mentioned besides information on experimental characterization of MEMS gyroscopes. within the moment half, layout options that enhance robustness of the micromachined sensing aspect are brought, supported by means of confident computational examples and experimental effects illustrating the material.
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Additional info for MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness (MEMS Reference Shelf)
Again, in a simple single-mass design, mC , md and ms are equal. 45) To achieve the maximum possible gain in the sense-mode, it is generally desirable to operate at or near the peak of the sense-mode response curve. This is typically achieved by matching drive and sense resonant frequencies. e. 46) Investigating the resonant amplitude of the sense-mode Coriolis response, the sensitivity of the gyroscope to the angular rate input Ωz can be improved by • Increasing the drive-mode oscillation amplitude x0 • Increasing Qs by decreasing damping, usually by vacuum packaging • Maximizing the mass mC that generates the Coriolis force, while minimizing the total mass ms excited by the Coriolis force.
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