By Rudolf K. Bock, Werner Krischer
This BriefBook is a miles prolonged thesaurus or a miles condensed instruction manual, looking on the best way one seems to be at it. In encyclopedic layout, it covers topics in facts, computing, research, and similar fields, leading to a e-book that's either an advent and a reference for scientists and engineers, in particular experimental physicists facing facts research.
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L. , Comparison on nanometrology – NANO2: step height, Metrologia 40, 04001 (2003). K. Herrmann, W. Mirand, K. Hasche, and F. Pohlenz, Investigations on gratings with period length in the nanometre range, in Proceedings of the 5th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods, Bergisch-Gladbach, November 2001, PTB-Bericht F-44, S. 78–85 (2001). P. Heydemann, Determination and correction of quadrature fringe measurement errors in interferometers, Appl.
11 Investigations into the guiding properties and noise behavior of the LR-SFM Topography image of a flatness standard. is mainly due to external influences such as building vibrations and acoustic excitations, and it should be reduced by optimizing the environmental conditions. Suitability of the LR-SFM for measurements on lateral standards and determination of the structure period is illustrated by the example of a sinusoidal lattice. ). As calculation of the structure period is based on a statistical procedure, a larger number of structures allows us to improve the measurement uncertainty of the measuring procedure, provided the sample structure is homogeneous.
Instrum. 68, 17–22 (1997). 16 G. Basile, P. Becker, A. Bergamin, G. Cavagnero, A. Franks, K. Jackson, U. Kuetgengs, G. Mana, E. W. Palmer, C. J. Robbie, M. Stedmana, J. Stuempel, A. Yacoot, and G. Zosi, Combined optical and x-ray interferometry for high-precision dimensional metrology, Proc. R. Soc. Lond. A 456, 701–729 (2000). 17 A. Bergamin, G. Cavagnero, G. Mana, E. Massa, and G. Zosi, Measuring small lattice distortions in Si-crystals by phasecontrast x-ray topography, J. Phys. D: Appl. Phys.