Download Bio-MEMS: Technologies and Applications by Wanjun Wang, Steven A. Soper PDF

  • admin
  • April 20, 2017
  • Microelectronics
  • Comments Off on Download Bio-MEMS: Technologies and Applications by Wanjun Wang, Steven A. Soper PDF

By Wanjun Wang, Steven A. Soper

Microelectromechanical platforms (MEMS) are evolving into hugely built-in applied sciences for numerous program components. upload the organic measurement to the combo and a number of latest difficulties and concerns come up that require a wide knowing of features from easy, fabrics, and scientific sciences as well as engineering. gathering the efforts of popular leaders in every one of those fields, BioMEMS: applied sciences and purposes provides the 1st wide-reaching survey of the layout and alertness of MEMS applied sciences to be used in organic and scientific components. This ebook considers either the original features of organic samples and the demanding situations of microscale engineering. Divided into 3 major sections, it first examines fabrication applied sciences utilizing non-silicon techniques, which use fabrics which are acceptable for medical/biological analyses. those contain UV lithography, LIGA, nanoimprinting, injection molding, and hot-embossing. realization then shifts to microfluidic elements and sensing applied sciences for pattern coaching, supply, and research. the ultimate part outlines a number of purposes and platforms on the cutting edge of BioMEMS expertise in a number of components comparable to genomics, drug supply, and proteomics. Laying a cross-disciplinary origin for additional improvement, BioMEMS: applied sciences and purposes presents engineers with an figuring out of the organic demanding situations and organic scientists with an knowing of the engineering demanding situations of this burgeoning know-how.

Show description

Read Online or Download Bio-MEMS: Technologies and Applications PDF

Similar microelectronics books

Low pressure plasmas and microstructuring technology

This monograph offers an up to the moment point of view of gasoline discharge physics and its functions to numerous industries. It starts off from a complete review of the differing kinds to generate plasmas by way of DC discharges, capacitive and inductive radiofrequency coupling, helicon waves together with electron cyclotron resonance, and ion beams.

Customizable Embedded Processors: Design Technologies and Applications (Systems on Silicon)

Customizable processors were defined because the subsequent average step within the evolution of the microprocessor enterprise: a step within the lifetime of a brand new expertise the place best functionality on my own is not any longer enough to assure marketplace good fortune. different elements turn into primary, corresponding to time to marketplace, comfort, strength potency, and simplicity of customization.

Discontinuous Systems: Lyapunov Analysis and Robust Synthesis under Uncertainty Conditions

An enormous challenge up to speed engineering is powerful suggestions layout that stabilizes a nominal plant whereas additionally attenuating the impression of parameter diversifications and exterior disturbances. This monograph addresses this challenge in doubtful discontinuous dynamic platforms with distinctive realization to electromechanical platforms with hard-to-model nonsmooth phenomena reminiscent of friction and backlash.

Adhesion in Microelectronics

This complete publication will offer either primary and utilized features of adhesion referring to microelectronics in one and simply available resource. one of the themes to be coated include;Various theories or mechanisms of adhesionSurface (physical or chemical) characterization of fabrics because it relates to adhesionSurface cleansing because it relates to adhesionWays to enhance adhesionUnraveling of interfacial interactions utilizing an array of pertinent techniquesCharacterization of interfaces / interphasesPolymer-polymer adhesionMetal-polymer adhesion  (metallized polymers)Polymer adhesion to numerous substratesAdhesion of skinny filmsAdhesion of underfillsAdhesion of molding compoundsAdhesion of alternative dielectric materialsDelamination and reliability matters in packaged devicesInterface mechanics and crack propagationAdhesion dimension of skinny movies and coatings

Additional resources for Bio-MEMS: Technologies and Applications

Example text

Hong, L. J. Yang, and H. Q. Gong, Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS, J. Micromech. , 11, 20–26, 2001. [18] C. Lin, G. Lee, B. Chang, and G. Chang, A new fabrication process for ultrathick microfluidic microstructures utilizing SU-8 photoresist, J. Micromech. , 12, 590–597, 2002. [19] P. M. Dentinger, K. L. Krafcik, K. L. Simison, R. P. Janek, and J. Hachman, High aspect ratio patterning with a proximity ultraviolet source, Microelectronic Engineering, 61–62, P1001–1007, 2002.

B) A combination of optical and soft x-ray lithography with subsequent gold plating is used to fabricate x-ray masks with critical dimensions down to 2 µm. Mask fabrication combines a number of techniques starting with electron or photon or laser beam writing of the initial design onto a chromium or optical mask substrate. 5a) [32]. After exposure, baking, and development, the resist structure is used as a template and the open areas are filled with gold by electroplating. Resist removal and mask mounting onto a support ring completes the process.

41/42, 371–374, 1998. [6] J. Williams and W. Wang, UV-LIGA fabrication of electromagnetic power microrelays, presented at the International Symposium on Test and Measurement (ISTM/2001), Shanghai, China, June 2001. [7] C. Oropeza, K. Lian, and W. Wang, “Fracture toughness study on LIGA fabricated microstructures,” presented in Micromachining and Microfabrication, Photonics West, San Jose, California, January 2003. fm Page 41 Tuesday, November 14, 2006 10:41 AM UV Lithography of Ultrathick SU-8 41 [8] D.

Download PDF sample

Rated 4.29 of 5 – based on 46 votes