By Wanjun Wang, Steven A. Soper
Microelectromechanical platforms (MEMS) are evolving into hugely built-in applied sciences for numerous program components. upload the organic measurement to the combo and a number of latest difficulties and concerns come up that require a wide knowing of features from easy, fabrics, and scientific sciences as well as engineering. gathering the efforts of popular leaders in every one of those fields, BioMEMS: applied sciences and purposes provides the 1st wide-reaching survey of the layout and alertness of MEMS applied sciences to be used in organic and scientific components. This ebook considers either the original features of organic samples and the demanding situations of microscale engineering. Divided into 3 major sections, it first examines fabrication applied sciences utilizing non-silicon techniques, which use fabrics which are acceptable for medical/biological analyses. those contain UV lithography, LIGA, nanoimprinting, injection molding, and hot-embossing. realization then shifts to microfluidic elements and sensing applied sciences for pattern coaching, supply, and research. the ultimate part outlines a number of purposes and platforms on the cutting edge of BioMEMS expertise in a number of components comparable to genomics, drug supply, and proteomics. Laying a cross-disciplinary origin for additional improvement, BioMEMS: applied sciences and purposes presents engineers with an figuring out of the organic demanding situations and organic scientists with an knowing of the engineering demanding situations of this burgeoning know-how.
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Additional resources for Bio-MEMS: Technologies and Applications
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B) A combination of optical and soft x-ray lithography with subsequent gold plating is used to fabricate x-ray masks with critical dimensions down to 2 µm. Mask fabrication combines a number of techniques starting with electron or photon or laser beam writing of the initial design onto a chromium or optical mask substrate. 5a) . After exposure, baking, and development, the resist structure is used as a template and the open areas are filled with gold by electroplating. Resist removal and mask mounting onto a support ring completes the process.
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